Turbo molecular pump

This series of turbo molecular pump has the features of large pumping speed,  high compression ratio, impact resistant, expands the application range of the molecular pump.

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This series of turbo molecular pump has the features of large pumping speed,  high compression ratio, impact resistant, expands the application range of the molecular pump.

Turbo molecular pump  has no selectivity, no memory effect for the pumping gas. Because it has high compression ratio for the large molecular weight gas, so the pump doesn't need to cold trap and oil baffle can obtain high vacuum and high vacuum cleaner.

It is widely application to light volt, lighting, aerospace, semiconductor, energy, military industry, laser materials, automobile, home appliances and various fields of vacuum technology.

Technology parameter TYFB-600K Compound molecular pump TYFB-1200K Compound molecular pump YFB-1600K Compound molecular pump
High vacuum flange(mm) 150 CF 160 ISO-K 200 CF 200 ISO-K 250 CF 250 ISO-K

Foreline flange 

(mm)
40 KF 40 KF 50KF
Pumping speed(L/S) 600 1200 1600
Compression ratio N2 >109 >109 >109
H2 >8X103 >1X104 >1X104

Ultimate pressure

(Pa)
<8×10-8 <5×10-7 <8×10-8 <5×10-7 <8×10-8 <5×10-7
Motor revolutions
(n/min)
24000 24000 21000
Vib ≤0.1μm ≤0.1μm ≤0.15μm
Starting time(min) <5 <5 <6
Recommend backing pump 4-8 L/S 8-15 L/S 15 L/S

Type of cooling

Water cooling Water cooling water cooling
Water cooling temperature ≤25℃ ≤25℃ ≤25℃
Water cooling water flow rate(L/min) 1 1 1
Baking temperature of pump body <120℃ <120℃ <120℃
Pump inlet pressure(Pa) 7000 7000 7000
The input voltage of the heater(v) AC220 AC220 AC220

Direction of motor mounting 

Vertical±5° Vertical±5° Vertical±5°
Pump Weight (kg) ≈26 ≈31 ≈35
 

 

It is widely application to light volt, lighting, aerospace, semiconductor, energy, military industry, laser materials, automobile, home appliances and various fields of vacuum technology.
Turbo molecular pump 1 Turbo molecular pump 2 Turbo molecular pump 3