PACVD hard coating system

Industrial coating system is specifically designed for the deposition of functional and decorative diamond like carbon (DLC) coating on a wide range of substrates, PVD sputtering and PACVD process combining DLC can be extended its application range, and coatings can be customized according to the customer's requirements.

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PACVD hard coating system to provide complete sets of off-shelf operation, a set of standard formulation, allowing standard sedimentation based on diamond like carbon coating (DLC), pure a-C: H deposition not to sandwich depending on the application of chemical and mechanical requirements, single or multilayer deposition and carbon based top, in the DLC coatings are deposited after the selection of the substrate, including a variety of steel carbide, light metal, ceramic, plastic and other materials.

PACVD hard coating system features
►  2 plasma excitation sources (RF, DC / DC pulse);
►  Installed 2 closed field unbalanced magnetron sputtering on both sides;
►  With a front door of the hexagonal vacuum chamber, to ensure a clean environment;
►  Dry vacuum systems are designed to install in a separate space, handling high throughput of hydrocarbons and other processing gases;
►  Substrate, conductive and non-conductive coating and ion excitation system with high efficiency in situ cleaning;
►  The plasma excitation, its mode and frequency can be selected to adapt the plasma density and energy to the substrate, and be ionized with minimum pressure;
►  The shutters reduce magnetron targets being poisoned in PACVD process;
►  single PACVD process is not forced to rotate, a planetary rotation is also uniformly capable depositing on a sputter coating;
►  Especially in the PACVD process, the special design of air intake system can optimize the coating uniformity and cleanliness;
►  The selection of the pump and the upper and lower steam pressure regulation, to ensure the high reliability of the coating system;
►  IFIX based control system, easy batch, recipe and alarm processing;
►  All data acquisition, to ensure the best process control, making the best inspection plan in the process. In the batch operation, the operator can also copy the changes or new processes;
►  The user can set the access control system to ensure quality and safety of the system.

Target material: Ti, Cr, (Zr) single plates

Coating: a-C:H, a-Si:C:H

Nitrides: TiN, Cr, ZrN, Carbon nitride(TiCrN,CrCN), Combinations of Nitrides, 
          Carbo-nitrides and DLC

Available plasma area: PACVD: Ø 900 × H 700 mm
                  PVD/PACVD: Ø 600 × 500mm

Gases: Ar, H2, N2, C2H2, Si-Precursor

Loading: 200 kg

Tag: pvd coating machine         vacuum coating equipment         tools vacuum coating machine

HCDLC-380 Usable plasma volume Application technology target
Ø400x H450mm CMARC 2pcs×3
Production cycle Standard coating Custom coating
3-5hours/cycle TiN,CrN,AlTiN,AlCrN TiCN,TiAlCrN,TiAlSiN , DLC
Hardware Software Production/batch
Magnetic molecular pump
Pulse BIAS supply / HIPIMS
Plasma etching
Industrial PLC system
Industrial PC system
HCVACExpert remote diagnosis system
EndMills D4×50mm=864 D10×75mm=264
Insert D18×5mm=1440
Hobs D80×80mm=15
HCDLC-600 Usable plasma volume Application technology target
Ø400x H450mm CMARC 2pcs×3
Production cycle Standard coating Custom coating
4-6hours/cycle TiN,CrN,AlTiN,AlCrN TiCN,TiAlCrN,TiAlSiN , DLC
Hardware Software Production/batch
Magnetic molecular pump
Pulse BIAS supply / HIPIMS
HCD plasma etching
Industrial PLC system
Industrial PC system
HCVACExpert remote diagnosis system
EndMills D4×50mm=1920 D10×75mm=512
Insert D18×5mm=3276
Hobs D80×80mm=40
HCDLC-650 Usable plasma volume Application technology target
Ø400x H450mm CMARC 4pcs×3
Production cycle Standard coating Custom coating
3-6hours/cycle TiN,CrN,AlTiN,AlCrN TiCN,TiAlCrN,TiAlSiN , DLC
Hardware Software Production/batch
Magnetic molecular pump
Pulse BIAS supply / HIPIMS
Plasma etching
Industrial PLC system
Industrial PC system
HCVACExpert remote diagnosis system
EndMills D4×50mm=4032 D10×75mm=880
Insert D18×5mm=6400
Hobs D80×80mm=64
HCDLC-900 Usable plasma volume Application technology target
Ø400x H450mm CMARC 6pcs×3
Production cycle Standard coating Custom coating
5-8hours/cycle TiN,CrN,AlTiN,AlCrN TiCN,TiAlCrN,TiAlSiN , DLC
Hardware Software Production/batch
Magnetic molecular pump
Pulse BIAS supply / HIPIMS
Plasma etching
Industrial PLC system
Industrial PC system
HCVACExpert remote diagnosis system
EndMills D4×50mm=8640 D10×75mm=2200
Insert D18×5mm=1200
Hobs D80×80mm=140

 

Type name colour coating Micro 
hardness
(HV0.05)
Max. 
Usage 
temperature 
(℃)
Friction-
(fretting) 
coefficient
Thickness
 (um)
Nitrogen
ceramics
HAL Black ALTiN 3800 900 0.6 2.5±0.5
HAL Plus Black ALTiN 3800 900 0.6 4±0.5
HAL Mini Black ALTiN 3500 900 0.6 1.5±0.5
HAL B Atropurpureus ALTiN 3600 900 0.6 2.5±0.5
HAR Silver CrN 2000 700 0.3 3±0.5
HAT Golden TiN 2400 600 0.5 3±0.5
HAS Bronze AlTiSiN 3800 1000 0.4 3±0.5
HATC Gray TICN 3500 400 0.2 2±0.5
HATC Plus Bronze TICN 3200 400 0.25 2±0.5
HART Golden CrTiN 2500 600 0.4 2.5±0.5
HRA Blue grey AlCrN 3500 1000 0.4 4±0.5
HRAT Gray AlTiCrN 3200 900 0.4 3±0.5
DLC HCC Black CrN+W-C:H 2200 300 0.2 2±0.5
HCMC Black Cr+W-C:H+DLC 1800 300 0.1 2±0.5

 

Name Low
alloy
steel
High
alloy
steel

Stainless
steel

Cast
iron
Copper Bronze Si<12%
Al alloy
Si>12%
Al alloy
Wood Plastic Drill Drill
cutting
EndMill Milling
tool
Turnin
insert
Hob Slottin
cutter
Hob
slottin
cutter
Tap
HAL Plus A- A A- A             A A   A- A A A A  
HAL Mini A- A A A                 A-            
HAL B A- A A- A             A- A- A A- A-        
HAR         A A     A A                 A-
HAT A               A A A- A- A- A- A- A- A- A- A-
HAS A-   A-               A A A A          
HATC             A A                     A-
HATC Plus             A A             A-       A
HART A A- A-   A- A-     A A A A A A- A- A- A- A-  
HRA A- A A A- A- A- A- A- A- A- A- A- A- A- A-        
HRAT A A A A- A- A- A- A- A- A- A A A A A A A A  
HCC           A A A- A A                 A
HCMC           A A A- A A                 A-
  A:Applicable of existing materials or processing environment
A-:Can be used in the  materiial and  processing environment

 

 

 

 

Typical applications:
• Tribological applications
• Plastic processing
• Optical industry
• Semiconductor industry
• Auto parts
•Engineering
• Racing parts
Hard coatings