Magnetron sputtering/evaporation vacuum coating machine

The device combine magnetron sputtering and vacuum evaporation coating technology in one chamber,not only use the magnetron sputtering cathode glow discharge technique to ionize and deposit the molecule(target) on the base material(PVD), as well as the resistance heating technique in the vacuum to melt and vaporize the metal wire to deposit on substrate. 

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The device combine magnetron sputtering and vacuum evaporation coating technology in one chamber,not only use the magnetron sputtering cathode glow discharge technique to ionize and deposit the molecule(target) on the base material(PVD), as well as the resistance heating technique in the vacuum to melt and vaporize the metal wire to deposit on substrate. Increasing the use and flexibility of the equipment.The device is used in mobile phones and other plastic shell surface metallization, used in non-conductive film and electromagnetic shielding film deposition.

The equipment integrates the plasma treatment, high-end cathode magnetron sputtering, resistance evaporation coating technology.It has the feactures of high deposition rate,strong adhesion,smooth and shinning coating,good uniformity etc.Machine can be full automatic control,large loading capacity,reliable running,high qualitified,low cost and environment protective.It is mainly applied to computer shell,mobile shell,household appliances etc industries.It can deposit metal film,alloy film,composite film,transparent(translucent)film,non-conductive film and electromagnetic film etc.

Tag: pvd coating machine           vacuum metalizing equipment              evaporation coating system

Chamber size Φ800×1200 Φ1600×1800
Power 68KW 115KW
Power type magnetron power、arc power、Pulse bias power supply
Sputtering and electrode structure Cylindrical magnetron target, flat rectangular target, twin target evaporated electrode
Vacuum chamber structure Vertical double door, vertical single door, horizontal single door, rear exhaust system
Ultimate vacuum 10-4Pa
Vacuum system  Diffusion pump/Molecular pump +Roots pump +Mechanical pump +Holding pump
Pumping time Pump from atmosphere to 5.0×10-2Pa≤7min
Workpiece motion mode Public rotation Frequency control: 2-20r/minute
control mode Manual/Automatic all in one mode, Touch screen + PLC
Remark We can design the dimension of the equipment according to customer’s special technique requirement.
It is mainly applied to computer shell,mobile shell,household appliances etc industries.It can deposit metal film,alloy film,composite film,transparent(translucent)film,non-conductive film and electromagnetic film etc.
Mobile Shell Computer Case Household appliances shell Cosmetic bottle cap EMI