Optical Vacuum Coating Machine

Computer automatic control, interface design simple operation, high reproducibility coating, equip with crystal sensor thickness meter, automatic evaporation deposition system, input parameters, process control and data storage capabilities, strengthen production management, reduce production costs, can coat metal, compound oxide, film has excellent spectral curve stability.

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Optical Vacuum Coating Machine is computer automatic control, interface design simple operation, high reproducibility coating, equip with crystal sensor thickness meter, automatic evaporation deposition system, input parameters, process control and data storage capabilities, strengthen production management, reduce production costs, can coat metal, compound oxide, film has excellent spectral curve stability.

By electron beam evaporation source technology, equip two sets of electron gun, produce high heat to evaporate coating materials, high-performance optical thick monitor combined with computer, realize intelligent control, can achieve ultra- high-precision optical thickness, install automatic reverse design can shorten the operation time of deposition, to achieve high productivity and reduce production costs, using a combination of electrical control modular, easy to maintain, automatically rotating the workpiece holder .

Widely used in all kinds of precision optical film plating, electrical membrane, such as laser mirror, resin lenses, various filters, cold light film of film, antireflection film, sun protection film, silicon coating and metal film.  

Chamber size Ф1100×1520mm(H) Ф1300×1610mm(H) Ф1550×1800mm(H) Ф1800mm×1920mm(H)
Workpiece holder Ф950mm Ф1130mm Ф1400mm Ф1600mm
Rotating speed 10rpm to 50rpm(variable) 10rpm to 30rpm(variable)
Film thickness control Optical thickness monitor(wave leghth range 350nm to 1100nm,reflective/transmissive optional
Thickness meter XTC/3+6 crystal sensor
Evaporation source electron gun 2sets electron gun 2sets electron gun 2sets electron gun 2sets
Ion source 17cmRF ion source 17cmRF ion source 17cmRF ion source 23cmRF ion source
Exhaust system Mechanical pump+diffusion pump/molecular pump+low temp water pump(or 2 condensate pumps)
Performance
Reach pressure Below 7.0×10-5Pa  Below 7.0×10-5Pa  Below 7.0×10-5Pa  Below 7.0×10-5Pa 
Exhaust time 20min (atmosphere~1.3×10-3Pa) 15min (atmosphere~1.3×10-3Pa) 20min (atmosphere~1.3×10-3Pa) 20min (atmosphere~1.3×10-3Pa)
Working condition
Power 3phase ,100KVA 3 phase,104KVA 3 phase,120KVA 3 phase,150kVA
Water flow more than 120L/MIN more than 140L/MIN more than 180L/MIN more than 220L/MIN
Air pressure more than 0.5MPa more than 0.5MPa more than 0.5MPa more than 0.5MPa
 

 

1 DSLR / Digital Camera Lens 2 . Monitor / projector lens 3 color filter / mirror 4 IR / UV filter 5.AR Coating 6 cell phone camera
Luminescent film Lens Optical film sample lens sample