The magnetron sputtering coating process is easy to control and has good repeatability, and is widely used in the preparation and industrial production of various types of films. The application of magnetron sputtering coating technology is illustrated by three examples.


Curtain wall glass, which is widely used in the outer walls of high-rise buildings, is a solar-controlled membrane glass. Its basic function is to pass visible light in the sunlight, while reflecting in the infrared and far-infrared bands. It can not only meet the basic needs of indoor lighting, but also avoid the disadvantages of heat radiation in the infrared part. The simplest film system of the solar control film is generally divided into three layers. The first layer is a compound film (TiN, Ti(O)N, etc.), which can be reacted by magnetron sputtering (passing reactive gas, depositing target and The compound produced by the atmosphere reaction is prepared by RF sputtering technology; the second layer is a metal film (Cr, Cu, Ti, Ag, etc.) for adjusting transmittance and reflectivity, which is generally prepared by DC magnetron sputtering technology; The layer is a protective layer (TiO2, etc.), and a reactive magnetron sputtering technique or a radio frequency sputtering technique can be employed.

The transparent conductive film on the transparent conductive glass is generally an indium tin oxide (ITO) film, and the large-scale production of the ITO film is a reactive magnetron sputtering technique. The structure of ITO glass for LCD has three layers (glass/SiO2/ITO). The current plating technology of mature ITO film glass is: SiO2 film is prepared by RF sputtering using SiO2 target; ITO film is made of oxygen-deficient ITO. Prepared by oxygen-activated magnetron sputtering.