Equipment
- ALD system
- Optical coating
- Automotive parts
- Decorative coating
- Super hard coating
- Roll to Roll
- Energy
Application
- Solar
- Semiconductor
- Automotive
Technology
- ALD
- PVD
- CVD
- PECVD
Information
- HCVAC Listing
- Exhibition
- How to operate the equipment
High power pulsed magnetron sputtering (HIPIMS) technology
Under the condition of low frequency and low duty cycle, the target was sputtered by hipims technology with very short pulse voltage. During the time of applying voltage, the magnetron target generates MW level pulse energy, while maintaining low average power. High density ions are produced in the plasma.
