A vacuum coating machine needs many
parts. Without one part, it can't be combined into a complete coating machine.
So, what parts are there in a specific coating machine? Let's introduce it to you.
First, there
must be a vacuum chamber first, and the workpiece to be coated must be coated
in the vacuum chamber. Therefore, this coating room is an indispensable part.
Secondly,since the vacuum coating machine is to coat the film in a vacuum environment,there must be components to make the vacuum chamber in a vacuum state, and several pumps, such as mechanical pump, Roots pump and molecular pump system,must be used in combination.
Third, the vacuum measuring part, the vacuum measuring part of the vacuum system, is to measure the pressure in the vacuum chamber. Like a vacuum pump, no vacuum gauge can measure the whole vacuum range, so people have made many kinds of vacuum gauges according to different principles and requirements. Such as thermocouple meter, ionization meter, pirani meter and so on.
Fourth, the power supply part, the target power supply mainly includes DC power supply, intermediate frequency power supply, pulse power supply and radio frequency power supply (RF). Common power supply manufacturers include AE,ADL, Hottinger and so on.
Fifth, process gas input system, process gases, such as argon (Ar), krypton (Kr), nitrogen (N2), acetylene (C2H2), methane (CH4), hydrogen (H2), oxygen (O2), etc., are generally supplied by gas cylinders, through gas pressure reducing valves, gas stop valves, pipelines, gas flow meters, electromagnetic valves and piezoelectric valves, and then into the vacuum chamber. The advantages of this gas input system are that the pipeline is simple and bright, and it is easy to repair or replace the gas cylinder.
Sixth, for the mechanical transmission part, the coating requires that the thickness of the periphery must be uniform and consistent, so there must be three turns in the coating process to meet the requirements. That is, while the large workpiece table is required to rotate (I), the small workpiece support table also rotates (II), and the workpiece itself can also rotate simultaneously (III). In mechanical design, generally, there is a large driving gear in the center of the bottom of the large workpiece turntable, surrounded by some small planetary wheels engaged with it. If the product rotation is to be realized, the workpiece rotation is usually moved by a fork.
Seventh, in the heating and temperature measuring part,vacuum coating machines generally have heaters in different positions, and thermocouples are used to measure and control the temperature. However, because the position of thermocouple clamping is different from that of workpiece, the temperature reading cannot be the real temperature of workpiece. There are many ways to measure the real temperature of the workpiece. You can install high temperature test paper or thermocouple meter on the workpiece.
Eighth: ion evaporation and sputtering source. The evaporation source of multi-arc plating is generally round cake, commonly known as round cake target, and there are
also rectangular multi-arc targets. A magnet is installed in the target seat. By moving the magnet back and forth to change the magnetic field intensity, the moving speed and trajectory of the arc spot can be adjusted. In order to reduce the temperature of the target and the backing plate, cooling water should be continuously introduced into the backing plate. In order to ensure the high electrical and thermal conductivity between the target and the backing plate, a tin gasket can be added between the target and the backing plate. Magnetron sputtering coating generally adopts rectangular or cylindrical sputtering cathode.
Ninth: Water cooling system, generally composed of cold water tower, ice water machine, water pump, etc.
Tenth: industrial control system.
