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How to measure the film thickness of pvd coating machine?

2022-02-22

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       In our daily life, many daily items are coated with a layer of film by the pvd coating machine, which makes the products not only more beautiful, but also more practical. But many people will have a question, since it is coated with a layer of film, the film must have a thickness, so how thick is the thickness of the film, and how to measure it? The following Xiaobian Huicheng Vacuum will introduce in detail how to measure the film after the vacuum coating machine, I hope it can help you:


pvd coating machine


       The thin film must be deposited on the substrate, so there is no problem of thin film deposition without the substrate. The cleaning quality of the substrate has the most important influence on the quality of the film. At the same time, the thickness of the film must be known in the production of the film. It is meaningless to talk about the measurement of the film properties without the thickness of the film. Therefore, the measurement of the film thickness and the cleaning of the substrate can be said to be important technologies related to the production of thin films. Generally, the so-called thickness refers to the distance between two completely flat parallel planes. This concept is a geometric concept. The ideal film thickness refers to the distance between the substrate surface and the film surface. In the three-dimensional measurement of film topography, relative to the thickness of the film, the other two-dimensional measurements can be said to be infinite. Because the actual surface is uneven and discontinuous, and there may be pores, impurities, lattice defects and surface adsorption molecules in the film, all the thickness of the film must be strictly defined and accurately measured. is very difficult. The definition bit of the film thickness should be determined according to the method of the address measurement and the purpose of the address measurement. Therefore, the same film, using different measurement methods will get different results, that is, different thicknesses.
Surface in thin film oil measurement is not a geometric concept, but a buried concept, which refers to the collection of surface molecules (atoms). The average surface means that the algebraic sum of the distances from all points of the surface atoms to this surface is equal to zero, and the average surface is a kind of concept.
       We usually call the average surface of the collection of surface molecules on one side of the substrate as the substrate surface; the average surface of the surface on the side of the film that is not in contact with the substrate is called the shape surface of the film, and the measured film is called the shape surface of the film. The atoms are rearranged so that the density is exactly the same as that of the bulk solid material and evenly distributed on the surface of the substrate. At this time, the average surface is called the equivalent surface of the film mass; according to the physical properties of the measured film, it is equivalent to a length of A thin film of a bulk solid material with the same width as the measured thin film, the average surface at this time is called the equivalent surface of the physical property of the thin film. The shape film thickness is the film thickness closest to the intuitive form, usually in µm; the mass film thickness reflects the amount of substances contained in the film, usually in µg/cm#8217;, and the physical film thickness is more practical in practical use. Useful and relatively easy to measure.
        Since the actual surface is not flat, and at the same time, various defects, impurities and adsorbed molecules are inevitably present in the film production process, no matter which method is used to define and measure the film thickness, it is an average value, and The thickness of the film is sufficient to include impurities, defects and adsorbed molecules.
         The pvd coating machine coating is carried out under the vacuum chamber. For measuring the thickness of the film, a professional measuring instrument in this area is required to measure the thickness. Under normal circumstances, the manufacturers of vacuum coating machines generally have this One instrument sales