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Application principle of cryogenic capture pump of pvd coating machine

2022-05-11

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       The pvd coating machine has a component called the cryogenic capture pump. If the professional vacuum coating personnel do not mention this component, many people almost do not know such a component, so what is the use of the cryogenic capture pump in the pvd coating machine? What does it do? The following Xiaobian Huicheng Vacuum will introduce the application principle of the cryogenic capture pump of the pvd coating machine to you, hoping to help you:


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      In the high vacuum environment, there is a certain residual gas. Since the molecular weight of water is smaller than that of the main components of air such as oxygen and nitrogen, no matter whether it is an oil diffusion pump or a molecular pump, it cannot be pumped out quickly and efficiently, so it accumulates more and more, and finally becomes 65% of the residual gas. ~95% residual gas;
     At the same time, due to the inevitable phenomenon of pump oil evaporation during the use of the vacuum pump, a small amount of oil vapor will enter the vacuum system.
     Due to the existence of water vapor and oil vapor, the vacuum system cannot quickly reach the vacuum degree required by customers, resulting in longer vacuuming time and reduced production efficiency. The higher the required vacuum degree, the greater the environmental humidity, the more obvious the impact.
     At the same time, the existence of water vapor and oil vapor will lead to the decrease of the firmness of the film layer, the inability of multi-layer coating, and the uneven color.
      Water vapor can also ionize under certain conditions, producing oxygen, which oxidizes the target and causes the color of the coating to change. The higher the ambient humidity, the higher the temperature, the higher the required vacuum, and the greater the impact. Therefore, water vapor and oil vapor are the main hazardous gases in the field of pvd coating machine coating and high vacuum acquisition.