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Introduction of coating principle of ion vacuum coating machine

2021-09-08

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Ion vacuum coating machine is a coating technology developed by Sandin Company of the United States, which combines vacuum evaporation and vacuum sputtering. Ion plating is a process in which working gas or evaporated substances are partially ionized by gas electricity under vacuum conditions, and evaporated substances or other reactants are deposited on the surface of the substrate under the bombardment of working gas ions or evaporated substances.

Unde that bombardment of gas ions or evaporate matter ions, evaporating the evaporate matter or its reactants on the workpiece. Including magnetron sputtering ion plating, reactive ion plating, hollow cathode discharge ion plating (hollow cathode evaporation method), multi-arc ion plating (cathode arc ion plating), etc. Ion plating combines glow discharge, plasma technology and vacuum evaporation technology, which not only obviously improves various properties of coating, but also greatly expands the application range of coating technology. Ion plating not only has the advantages of vacuum sputtering, but also has the advantages of strong adhesion, good diffraction and a wide range of plating materials. Therefore, it has developed rapidly at home and abroad in recent years. The basic principle of ion plating is to ionize metal or alloy vapor by glow or arc discharge of an inert gas. Ion plating includes heating, evaporation and deposition of coating materials (such as TiN and TiC). When the atoms of evaporation coating material pass through the glow zone, a small part of them ionize and fly to the workpiece under the action of the electric field, and they shoot on the surface of the workpiece with thousands of electron volts, which can penetrate into the depth of the substrate about several nanometers, thus greatly improving the binding force of the coating. However, the atoms of evaporation material which are not ionized are directly deposited on the workpiece to form a film. The sputtering of inert gas ions and coating material ions on the surface of the workpiece can also remove pollutants on the surface of the workpiece, thus improving the bonding force.

The coating technology of ion vacuum coating machine is widely used, and it can be used to coat metal, alloy, conductive material and even non-conductive material substrate. The film deposited by ion plating can be metal film, multi-element alloy film and compound film, which can be plated with one layer or multiple layers, and can also be plated with gradient coating and nano multi-layer coating. By using different film materials, different reaction gases and different process methods and parameters, hard wear-resistant coating with strengthened surface and corrosion-resistant coating with stable chemical properties can be obtained.