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Introduction of high frequency induction evaporation source evaporation method for winding vacuum coating machine

2022-04-06

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        The coating technology of winding vacuum coating machine includes resistance evaporation coating technology, induction evaporation coating technology, intermediate frequency magnetron sputtering technology and DC magnetron sputtering coating technology. High-frequency induction evaporation coating technology is generally gold-plated silver wire, because there can be no large droplets and other reasons.



        The high-frequency induction evaporation source of the winding vacuum coating machine is to place the graphite or ceramic crucible containing the evaporation material in the center of the water-cooled high-frequency helical coil, so that the evaporation material can generate strong eddy current loss and Hysteresis loss (for ferromagnets), which causes the evaporating material to heat up until it evaporates. The smaller the volume of the membrane, the higher the frequency of induction. In large-scale equipment for continuous vacuum aluminum deposition on steel strips, the high-frequency induction heating evaporation process has achieved satisfactory results.
       The advantages of high-frequency induction evaporation source, the evaporation rate is large, which can be about 10 times larger than that of the resistance evaporation source, the temperature of the evaporation source is uniform and stable, and it is not easy to produce splash phenomenon. When the evaporation material is metal, the evaporation material can generate heat, and the evaporation source is charged at one time. , No feeding mechanism is required, the temperature control is relatively easy, and the operation is relatively simple.
       The disadvantage of the high-frequency induction evaporation source of the winding vacuum coating machine is that a boron nitride crucible with good thermal shock resistance and stable high temperature chemical properties must be used, the evaporation device must be shielded, and a complex and expensive high-frequency generator, coil The nearby pressure has a fixed value, and beyond this fixed value, the high-frequency field will ionize the residual gas and increase the power consumption.