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Introduction to the composition and structure of electron beam evaporation vacuum coating machine

2022-04-25

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       Electron beam evaporation vacuum coating machines are mostly used in the field of optical vacuum coating technology, such as our mobile phone screens, mobile phone cases, cameras, spectacle lenses, digital product screens, etc., all use electron beam evaporation coating machines, and optical coating technology has penetrated into our lives. , Inseparable, so what is the structure of the electron beam evaporation coating machine? The following is a detailed introduction to the vacuum coating machine, hoping to help you:


Electron beam evaporation vacuum coating machines


       Electron beam evaporation vacuum coating machine is mainly composed of control system, vacuum air system and electron gun system.
       The vacuum air circuit in the electron beam evaporation vacuum coating machine has two pumps in the vacuum air circuit, namely the front-stage mechanical pump and the high-vacuum cryogenic pump. The original purpose of cold umbrella adsorption is to achieve the purpose of vacuuming. In the process of starting the high-vacuum cryogenic pump, the fore-stage mechanical pump will first put the pipeline in a vacuum state. When the vacuum degree of the pipeline reaches a certain level, the Qianji valve will be opened, so that the fore-stage mechanical pump will be opened. The pump will continue to work so that both the piping and cryopump have a vacuum, and then the foreline valve will repeat the above steps.
       The evaporation source of the electron beam is mainly composed of an electron gun and a crucible. When necessary, a set of mechanical equipment that can provide raw materials for the coating machine may be attached. In most cases, the design of the control device and crucible for generating and controlling the electron beam is integrated in the coater. The following are the structural forms of several manifestations of the electron beam heating evaporation source;
       ①Evaporator heated by linear cathode and electrostatic focusing.
       ②Evaporator heated by annular cathode and electrostatic focusing.
       ③Evaporator heated by axial gun and electrostatic far-focusing method.
       ④Evaporator heated by axial gun, magnetic focusing and magnetic deflection 90 degrees.
       ⑤ E-type electron gun evaporator, electron beam evaporation vacuum coating machine The electron trajectory emitted by the e-type electron beam evaporation source is similar to the word "e", so it is referred to as the e-type gun.
       At present, this form of evaporation source is most widely used in the vacuum evaporation film process.