News centres

Home > News > Industry Trends > Main components of vacuum coating machine

Main components of vacuum coating machine

2022-05-03

400
Share

       A vacuum coating machine needs a lot of components. Without one component, there is no way to combine it into a complete coating machine. So what are the components of a specific coating machine? The following is a brief introduction to the vacuum editor, I hope to be able to reach you:



vacuum coating machine



First: First of all, there must be a vacuum chamber, and the workpiece that needs to be coated must be coated in the vacuum chamber. Therefore, this coating chamber is an indispensable part.
       Second: Since the vacuum coating machine is to coat in a vacuum environment, there must be components to make the vacuum chamber achieve a vacuum state.
Several pumps must be used in combination, such as mechanical pumps, Roots pumps, molecular pump systems, etc.
       Third: the vacuum measurement part, the vacuum measurement part of the vacuum system, is to measure the pressure in the vacuum chamber. Like a vacuum pump, no vacuum gauge can measure the entire vacuum range, so people have made many types of vacuum gauges according to different principles and requirements. Such as thermocouple meter, ionization meter, Pirani meter and so on.
       Fourth: the power supply part, the target power supply mainly includes DC power supply, intermediate frequency power supply, pulse power supply, radio frequency power supply (RF), common power supply manufacturers are AE, ADL, Huttinger, etc.
       Fifth: process gas input system, process gas, such as argon (Ar), krypton (Kr), nitrogen (N2), acetylene (C2H2), methane (CH4), hydrogen (H2), oxygen (O2), etc., Generally, they are supplied by gas cylinders, through gas pressure reducing valve, gas shut-off valve, pipeline, gas flow meter, solenoid valve, piezoelectric valve, and then into the vacuum chamber. The advantage of this gas input system is that the pipeline is simple and clear, and the maintenance or replacement of the gas cylinder is easy.
       Sixth: For the mechanical transmission part, the coating requires that the thickness of the periphery must be uniform. Therefore, there must be three rotations in the coating process to meet the requirements. That is, when the large workpiece table is required to rotate (I), the small workpiece carrier also rotates (II), and the workpiece itself can rotate at the same time (III). In mechanical design, there is generally a large driving gear in the center of the bottom of the large workpiece turntable, surrounded by some small planetary gears meshing with it.
       Seventh: the heating and temperature measurement part, the vacuum coating machine generally has heaters in different positions, and the temperature is measured and controlled by thermocouples. However, since the thermocouple clamp is not in the same position as the workpiece, the temperature reading cannot be the true temperature of the workpiece. To measure the real temperature of the workpiece, there are many methods, you can install high temperature test paper or thermometer on the workpiece.
       Eighth: ion evaporation and sputtering source, the evaporation source of multi-arc plating is generally round cake, commonly known as round cake target, and there are also rectangular multi-arc targets. A magnet is installed in the target base. By moving the magnet back and forth to change the intensity of the magnetic field, the moving speed and trajectory of the arc spot can be adjusted. In order to reduce the temperature of the target and the target base, cooling water should be continuously supplied to the target base. In order to ensure high electrical and thermal conductivity between the target and the target base, a tin gasket can also be added between the target and the target base. Magnetron sputtering coatings generally use rectangular or cylindrical sputtering cathodes.
       Ninth: water cooling system, generally composed of cold water tower, ice water machine, water pump, etc.
       Tenth: Industrial Control System