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How should the vacuum chamber of pvd coating amchine be designed?

2022-07-13

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Designing this position is very important for every industry. Whether the product design is reasonable, beautiful, more advantageous, and whether it meets the needs of customers is particularly important. The same is true in the vacuum industry, whether the structure design of the pvd coating macine is reasonable, whether the appearance is beautiful, whether it meets the needs of customers, whether it is convenient to operate, etc., will affect the perfect type of the pvd coating machine. Therefore, only after the design is passed, the manufacturing, assembly and sales process will be smoother. So how should the vacuum chamber of the pvd coating machine be designed specifically? When considering the design of pvd coating macine, the following five points are the most important.


pvd coating machine


(1) Welding requirements
        According to the needs, there are also differences in the structural design of the vacuum chamber of the equipment. Commonly, there are cylindrical, conical, box-shaped and other structures. For the welding technology of our coating machine vacuum chamber, there are five basic requirements:
In order to prevent the deformation of the shell of the coating machine, the non-airtight welding of the vacuum chamber is generally intermittent welding.
The total length of the weld should be as short as possible, and the height should be greater than one-third of the thickness of the vacuum chamber shell to avoid some air leakage.
Welds should be convenient for vacuum leak detection.
Try not to cut holes in the welds.
There is no intersection between the welding seam and the welding seam, and the distance between the centerline positions of the two seams should be greater than 10cm.
    (2) Main material
       The vacuum chamber of the coating machine is usually made of metal rolled sheet as the main material. As the main material of the vacuum chamber, the requirements for weldability and air tightness are relatively high. The main material used for the vacuum chamber of a general coater is usually a metal or alloy such as mild steel, alloy steel, aluminum and copper. Stainless steel, on the other hand, is generally used in models that require high vacuum, corrosion-resistant processes.
     (3) Type of head
As an important part of the vacuum chamber of the coating machine, the head can be welded with the cylinder to form a whole. The head forms of pvd coating machine include spherical, conical, convex, flat cover and other head types.
    (4) Design of the door
      In order to facilitate the processing and operation of the equipment, the installation of various mechanisms in the room, and the delivery of materials, etc., a door is installed in the vacuum chamber of the evaporation coating machine. As a movable door, the common forms are convex, spherical, flat cover, and so on. The door of the vacuum chamber of the coating machine is usually composed of a sealing door panel, a door chain, a flange, a sealing ring and other structures. According to the structure of the shell of the vacuum chamber of the coating machine, the door panel has two kinds of convex surface and flat surface, and the shape is divided into circular and rectangular. The processing of the sealing groove of the rectangular door is inconvenient compared to the round door, so it is generally suitable for some small pvd coating machine. The flange should be finished after welding to avoid the deformation of the flange and affect the overall sealing performance of the equipment.
       The door switch can be optional manual or automatic form. The usual vacuum chambers have clamping systems, and the clamping systems include eccentric clamping systems, screw nut systems and other categories. The clamping system applies a "preload" to the sealing ring. But if the coater vacuum chamber is a bell jar type, there is no need for a clamping system, because its own weight can give enough preload to the sealing ring. The atmospheric pressure after pumping and vacuuming acts on the sealing ring, and its sealing performance is more guaranteed.
       Larger size coater vacuum chamber doors are more affected by atmospheric pressure and their seals are more likely to be damaged. Let's say a circular door with a diameter of two meters is subjected to a force of about 3 X 10N. Therefore, for the design of the sealing groove, the sealing ring should be prevented from being overstressed. Note that the cross-sectional area of the sealing groove is larger than the cross-sectional area of the sealing ring, and the structural deformation of the sealing ring is allowed to be within the range of 30%.
      (5) Water cooling design
       The vacuum chamber of the coating machine is usually equipped with a water cooling system. Since a coating machine vacuum chamber sometimes works continuously under a high temperature state for a long time, it is set up to prevent the deformation of the equipment shell and ensure the vacuum tightness. There are two structural forms of the water cooling system: one is to assemble a cooling water jacket on the outer wall of the vacuum chamber, and the other is to spirally weld the water pipe on the outer wall of the vacuum chamber.
       The above five points are the key issues that need to be paid attention to when setting up a pvd coating macine. To design a vacuum coating equipment, all aspects must be considered, because after the design is completed, it will enter the manufacturing process later. If you want to change the plan, it is difficult It's very big.