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How to debug and control the uniformity of the coating process of the pvd coating machine

2022-08-11

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From the startup to the completion of the entire coating process, it is inseparable from the debugging of the machine. Therefore, if you want to become a professional coating technician, the methods and skills of debugging the pvd coating machine must be mastered. Especially for new employees, when they just started the coating process, they often find that the debugging of the pvd coating machine is not up to standard, and the uniformity of the coating is not well controlled, so they are troubled. The following Xiaobian will explain to you how to debug the pvd coating machine and how to control the uniformity of the coating during coating, so that the entire coating process can be successfully completed.


pvd coating machine


First, you need to test the vacuum pumping speed of the equipment, and check the air leakage and the performance of each vacuum pump during the test; then test the sealing performance of the equipment, that is, after pumping to the limit, keep the pressure for 1 hour to see if the pressure drop meets the standard, and at the same time exclude small The third step is to test the product to test other performances, such as transmission, heating, insulation, etc.; if there is a process guarantee, continue to proof and test; and all tests should be recorded and recorded. The signature and the confirmation of the signature from the user department or engineering department are sufficient. For different principles of vacuum coating, the factors affecting the uniformity are also different. And the concept of uniformity itself will have different meanings with the coating scale and film composition. On the scale of optical films, the uniformity of vacuum coating is quite good, and the roughness can be easily controlled within 1/10 of the wavelength of visible light. The uniformity on the atomic layer scale, that is to say, to achieve 10A or even 1A surface flatness, is the main technical content and technical bottleneck in the current vacuum coating. For the optical characteristics of the multi-arc ion coating machine, there is no obstacle to vacuum coating. . The atomic composition of the compound in the coating will easily produce uneven characteristics due to the small size, so the actual surface composition is not SiTiO3, but may be other ratios, and the coated film is not the desired chemical composition of the film, This is also the technical content of vacuum coating. For the uniformity of lattice order, which determines whether the film is single crystal, polycrystalline, or amorphous, it is a hot issue in vacuum coating technology.
The above methods of debugging the pvd coating machine and the uniformity of controlling the vacuum coating are the problems that everyone will often encounter in the coating process in the later stage. For new coating technicians, knowing this knowledge in advance will also be helpful for later coating.