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How to design the vacuum chamber of the pvd coating machine?

2022-08-17

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Compared with the pvd coating machine, everyone has doubts. Today, we will discuss the design of the vacuum chamber of the pvd coating machine. If you are interested, you can take a look at the following content with Baorui Titanium.


pvd coating machine


Vacuum coating technology is to use physical or chemical methods under vacuum conditions to obtain the desired film on the surface of the object. Vacuum coating technology is divided into evaporation coating, sputtering coating, ion plating, beam deposition and molecular beam according to the different methods used. Epitaxy, etc. The coating equipment used in this analysis uses magnetron sputtering coating.
 The vacuum chamber is a main component of the vacuum equipment. The design of the vacuum chamber of the pvd coating machine mainly considers the sealing and reliability. The structure must be reasonable. The material production of the vacuum equipment is carried out in the vacuum chamber. The impact should be small, the design should not be sloppy, and some problems should be paid attention to.
 The pvd coating machine using magnetron sputtering generally adopts a cylindrical main structure, and the structure must ensure rapid evacuation, because the air bag will slowly deflate