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Introduction to the basic process of coating by pvd coating machine

2022-10-08

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The pvd coating machine needs a process to coat the workpiece with a thin film. Just like our work, it has a sequence of what to do first and what to do later. It has a general process. The following is a summary of the vacuum coating process of the pvd coating machine to give you a general understanding of the vacuum coating process:


pvd coating machine


1. Cleaning the workpiece: connect the DC power supply, conduct glow discharge of argon to argon ion, argon ion bombards the workpiece surface, particles and dirt on the workpiece surface are splashed and thrown out;
2. Plating material gasification: namely, after AC power is applied, the plating material will be vaporized.
3. Migration of plating material ions: atoms, molecules or ions supplied by the gasification source rush to the workpiece at high speed after collision and high voltage electric field;
4. Deposition of atoms, molecules or ions of plating material on the substrate: when the number of evaporated material ions on the workpiece surface exceeds the number of ions lost by splashing, a layer of coating firmly adhered to the workpiece surface will be formed gradually.
During ion plating, the evaporated material particles have kinetic energy of 3000 to 5000 electron volts after ionization. When the workpiece is bombarded at high speed, not only the deposition speed is fast, but also it can penetrate the surface of the workpiece to form a diffusion layer that is very deep into the substrate. The interface diffusion depth of ion plating can reach four to five microns, which means that the diffusion depth of ion plating is dozens of times deeper, or even hundreds of times deeper than that of ordinary vacuum coating, so they adhere to each other very firmly.
The above is the general process of pvd coating machine. Evaporative coating technology, magnetron sputtering coating technology and multi arc ion coating technology are almost similar.