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Introduction of pvd coating machine by magnetron sputtering

2022-12-07

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pvd coating machine mainly refers to a kind of coating that needs to be carried out under high vacuum, including many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, etc. The main idea is divided into evaporation and sputtering. Magnetron sputtering pvd coating machine is widely used in the market, and many precision high-end coating technologies are prepared by using magnetron sputtering vacuum coating equipment technology.



For the magnetron sputtering coating equipment commonly used in the process of gradient color, PVD vacuum gradient coating process is adopted for gradient color housings of Huawei, Lenovo and other mobile phones.
Magnetron sputtering is a kind of physical vapor deposition (PVD). The general sputtering method can be used to prepare metals, semiconductors, insulators and other materials, and has the advantages of simple equipment, easy control, large coating area and strong adhesion. The magnetron sputtering method developed in the 1970s has achieved high speed, low temperature and low damage. Because high-speed sputtering is carried out at low pressure, the ionization rate of gas must be effectively improved. Magnetron sputtering increases the sputtering rate by introducing a magnetic field on the surface of the target cathode and using the magnetic field to constrain the charged particles to increase the plasma density.
The magnetron sputtering pvd coating machine is one of the most widely used equipment for coating existing products under vacuum conditions. A complete magnetron sputtering vacuum coating machine is composed of a multi part system, each system can complete different functions to achieve the final high-quality coating. The magnetron sputtering coating equipment consists of a vacuum chamber, a mechanical pump, a vacuum test system, an oil diffusion pump, a vacuum pumping system Condensate pump and film forming control system, etc.
The main body of the magnetron sputtering pvd coating machine is the vacuum chamber, and the size of the true chamber is determined by the processing products. The magnetron sputtering coating size can be customized. The chamber is generally made of stainless steel, which is required to be solid, durable and rust free. The vacuum chamber for magnetron sputtering coating has many connecting valves for connecting various auxiliary pumps.
The magnetron sputtering film forming control system can adopt different methods, such as fixed plating time, visual inspection, extreme monitoring and crystal vibration monitoring. The coating methods of vacuum coating machine and vacuum coating equipment are also divided into various processes, including ion evaporation coating and magnetron sputtering coating. Magnetron sputtering pvd coating machine magnetron sputtering method coating has strong adhesion, high purity, and can simultaneously sputter a variety of different components of materials.