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How to maintain the vacuum coating machine

2022-12-26

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The maintenance of the vacuum coating machine is a very important topic. When the purchaser purchases the vacuum coating machine, the manufacturer will generally provide the machine maintenance manual for the Shengchang equipment. For machines with high process requirements, employees will be arranged to provide on-site services, because it can be seen that both the purchaser and the manufacturer attach great importance to the maintenance of the vacuum coating machine. The following is a brief introduction to the maintenance skills of the vacuum coating machine. I hope it can help you:


1. Before restarting the diffusion pump, pay attention to leak detection.
The diffusion pump has been used continuously for more than 6 months, and the pumping speed is obviously slow, or the operation is improper. Fill it into the atmosphere, remove the connecting water pipe, remove the electric furnace plate, screw out the primary nozzle, first clean the pump chamber and pump liner with gasoline, then wash them with washing powder mixed with water, and then clean them with clean water. After the water evaporates, install the pump liner, add new diffusion pump oil, and install them back into the body, connect the water pipe, and install the electric furnace plate, You can restart.
The method is: start the maintenance pump, close the door, and after a few minutes, observe whether the vacuum degree of the diffusion pump part reaches 6X10 Pa, or conduct leak detection. Check whether the sealing rubber ring is installed at the joint, or the sealing ring is damaged. Heating can be carried out only after the hidden danger of air leakage is eliminated, otherwise the diffusion pump oil will burn the ring and cannot enter the working state.
2. When the crude pumping pump (slide valve pump, rotary vane pump) has been working continuously for one month (half in rainy season), it needs to be replaced with new oil.
The method is: unscrew the oil drain bolt, drain the old oil, and then start the pump for a few seconds to drain the old oil in the pump. Screw the oil return bolt and add new oil to the specified amount (oil sight glass observation). If it has been used continuously for more than half a year, open the oil cap when changing the oil and wipe the dirt in the box with a cloth.
3. The vacuum coating equipment shall clean the working room once after completing more than 200 coating procedures.
The method is: repeatedly scrub the wall of the vacuum chamber with saturated caustic soda (NaOH) solution (note that human skin cannot directly contact the caustic soda solution to avoid burns), so as to make the aluminum (AL) coated film react with NaOH. After the reaction, the film falls off and hydrogen is released. Then clean the vacuum chamber with clean water and clean the dirt in the fine extraction valve with a cloth dipped in gasoline.
The above are several common maintenance methods for vacuum coating machine after use. Daily maintenance of the machine is indispensable. We must master maintenance skills to improve the company's production capacity and reduce costs.