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What are the requirements for pvd coating machine

2023-05-04

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When operating the pvd coating machine, as a coating engineer, what skills should be possessed and what requirements should be required. Many coating professional engineers often report to us that new people must first receive professional training when they come in. If it is the same white paper and they directly take the operation with them, it may affect the work efficiency. Professional systematic training in advance can speed up the new people's knowledge of pvd coating machine, The starting time is also much shorter. Now let's introduce some basic requirements of pvd coating machine in advance.


pvd coating machine


1. The structural form of vacuum pipelines and static sealing components in the equipment should comply with the provisions of GB/T6070.
2. A vacuum measuring gauge shall be installed on the low vacuum and high vacuum pipes and on the vacuum deposition chamber to measure the vacuum degree of each part respectively. When an electric field is found to interfere with the measurement, an electric field shielding device should be installed at the measurement port.
3. If the main pump used in the equipment is a diffusion pump, an oil vapor trap should be installed on the inlet side of the pump
4. The coating room of the equipment should be equipped with observation windows and a baffle device. The observation window should be able to observe the working conditions of the sedimentary source and other key parts.
5. The design of ion plating deposition sources should strive to improve the ionization rate during the coating process, improve the utilization rate of coating materials, match the power of deposition sources reasonably, and arrange the position of deposition sources in the vacuum chamber body reasonably.
6. Reasonably arrange the heating device, and the general layout of the heater structure should ensure that the temperature rise of the plated workpiece is uniform and consistent.
7. The workpiece holder should be insulated from the vacuum chamber body, and the design of the workpiece holder should ensure that the film layer of the workpiece is uniform.
8. Ionic coating equipment should generally have a negative bias voltage for the workpiece and an ion bombardment power supply. The ion bombardment power supply should have a device to suppress abnormal discharge and maintain stable operation.
9. The insulation resistance values between different parts of the vacuum chamber connected to different potentials shall be in accordance with 4.4.6 of GB/T11164-1999

10. Other precautions
1) Environmental temperature: 10-30oC
2) Relative humidity: not more than 75%
3) Cooling water inlet temperature: not higher than 25oC
4) Cooling water quality: urban tap water or equivalent quality water.
5) Power supply: 380V three-phase 50Hz or 220V single-phase 50Hz (depending on the needs of the electrical appliances used); Voltage fluctuation range: 342-399V or 198-231V; Frequency fluctuation range: 49-51Hz.
6) The pressure, temperature, and consumption of compressed air, liquid nitrogen, cold water, hot water, etc. required for the equipment should be specified in the product manual.
7) The surrounding environment of the equipment should be clean, with clean air, and there should be no dust or gas that can cause corrosion on the surface of electrical appliances and other metal parts or cause conductivity between metals.

The above are the specific conditions for pvd coating machine under normal conditions. Only when these basic conditions are met, can it operate normally in the later period. Therefore, as a newcomer, these basic requirements should be kept in mind in advance, hoping to help everyone.