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Vacuum coating machine film thick measurement and monitoring method

2023-06-07

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Many merchants use vacuum coating machine coating products. In order to ensure the quality of the membrane layer, they will consider measuring the membrane layer. The method of measuring and monitoring of coating, I hope to help everyone.


vacuum coating machine


The most direct coating control method of a vacuum coating machine is the quartz crystal trace balance method (QCM). This instrument can directly drive the evaporation source and control the loop driving baffle through PID to maintain the evaporation rate. As long as the instrument is connected to the system control software, it can control the entire coating process. However, the accuracy of (QCM) is limited, partly because it monitors the quality of the coating rather than its optical thickness. In addition, although QCM is very stable at lower temperatures, when the temperature is high, it becomes very sensitive to temperature. During the long period of heating, it is difficult to prevent the sensor from falling into this sensitive area, causing significant errors to the membrane layer.
        Optical monitoring is the preferred monitoring method of high precision coating, which is because it can control the thickness of the membrane layer more accurately (if it is properly used). The improvement of accuracy comes from many factors, but the most fundamental reason is the monitoring of optical thickness. OptImAlsWA-I-05 single-wave length optical monitoring system is an indirect measurement and control, combined with advanced optical monitoring software developed by Dr. Wang, to effectively improve the theory and method of optical reactions to the sensitivity of membrane thickness to reduce the ultimate error. It provides feedback or transmission. Select mode and large -scale monitoring wavelength. It is particularly suitable for coating monitoring of various membrane thickness.