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A brief introduction to relevant knowledge about pvd coating machines

2023-10-23

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In the pvd coating machines, the substrate to be coated is called the substrate, and the material to be coated is called the target. The substrate and target are in the vacuum chamber. Evaporation coating generally heats the target to evaporate the surface components in the form of atomic groups or ions, and settles on the surface of the substrate to form a thin film through the film formation process. This coating technology is evaporation coating technology.


pvd coating machine


For sputtering coating, the pvd coating machines can be simply understood as using electrons or high-energy laser to bombard the target, causing the surface components to be sputtered out in the form of atomic groups or ions, and finally deposited on the surface of the substrate, undergoing a film-forming process. Finally, a thin film is formed. This coating technology is called magnetron sputtering coating technology.
The pvd coating machines is composed of a vacuum furnace body, vacuum pump, control cabinet, vacuum gauge, cooling system and other components. The vacuum donkey body can choose a double-layer water-cooled structure made of stainless steel, carbon steel or their combination. The target material is determined according to the specific coating layer to be plated, which coating layer to coat, what target material to use, or the relevant component gas to be injected to achieve the desired coating layer.
Choose different specifications and types of pvd coating machines according to process requirements. The types include resistance evaporation vacuum coating equipment, electron beam evaporation pvd coating machine, magnetron sputtering vacuum coating equipment, ion plating vacuum coating equipment, and magnetron reactive sputtering vacuum coating equipment. , hollow cathode ion plating and multi-arc ion plating, etc. The clamp operation modes include rotation, revolution and revolution + rotation. Users can put forward corresponding requirements according to the size and shape of the piece. The rotation speed range and rotation accuracy: ordinary adjustable and variable frequency speed adjustment, etc.