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Optical pvd coating machine cleaning methods and maintenance

2023-11-28

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Cleaning and maintenance of optical pvd coating machines are very important during the operation process. Good maintenance and cleaning directly determines the smoothness of the coating process and improves production capacity. Below, the editor of Huicheng Vacuum will introduce optical vacuum coating in detail. How to clean and maintain the machine daily.


optical pvd coating machines


The optical pvd coating machine works in three shifts and is used for about a week. In addition to the coating being plated on the surface of the workpiece, the lining plate in the workroom may be plated with materials due to non-directionality. The coating becomes thicker and thicker. The organization and winding are loose and absorb a large amount of gas, causing the pvd coating machine to pump out slower and slower. At this time, the working room and lining should be cleaned. If the disassembled parts are not necessary, they can be polished with sandpaper. The lining can be soaked in a hydrofluoric acid aqueous solution. The ratio of hydrofluoric acid to water depends on the length of soaking time and The principle is not to damage the lining board.

The premise is that the lining must be dried before installation. Before drying, the lining should be wiped dry as much as possible. After cleaning the work frame and other parts with sandpaper, all dust in the vacuum chamber needs to be cleaned. This can be done with a vacuum cleaner. When finally installing the liner, both the vacuum chamber and the liner need to be wiped clean with alcohol. Due to the use of electron guns and ion sources to assist coating, cleaning may be difficult. Sandblasting and other methods can be used to clean.

The optical coating machine needs to regularly replace the diffusion pump oil. The diffusion pump oil is used for a period of time, about two months (two shifts). Because in a long-term high temperature environment, although the diffusion pump is started at a higher vacuum, there is still residual oxygen and other components. It reacts with the diffusion pump oil, and the diffusion pump oil may also crack at high temperatures, causing its quality to deteriorate and prolonging the pumping time. It should be replaced when we think the time has extended too much.
Mechanical pump oil and maintenance pump oil will change in quality after two months of use. Because the oil may draw in moisture, impurities and other reasons, the viscosity of the used oil will become worse and the vacuum will decrease, so it needs to be replaced. If it is new equipment, it should be replaced within the first half month of use, because during the running-in period, the oil contains more running-in iron powder, which will aggravate wear.
Regularly clean the optical pvd coating machine and its surrounding environment, keep the inside and outside of the equipment clean, organize the environment around the equipment in order, and have a good working environment to ensure safety.