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Introduction to the working principle of multi-arc ion coating machine

2022-04-20

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 Multi-arc ion coating machines are very common in daily applications, and they account for a relatively high proportion in the coating industry. Many large-scale daily necessities and tools are coated with multi-arc ion coating machines, so there are many markets. Arc ion coating machine accounts for a high proportion, so what is the working principle of multi-arc ion coating machine? The following is a detailed introduction to the vacuum editor, I hope it can help you:


Multi-arc ion coating machines



The working principle of multi-arc ion plating technology is mainly based on the theory of cold cathode vacuum arc discharge. After the vacuum arc is ignited, some discontinuous, bright spots of various sizes and shapes appear on the surface of the cathode target. They swim rapidly and irregularly on the surface of the cathode. When some spots are extinguished, some spots are formed in other parts. Arc burning. The current density of the cathode spot is 104~105A/cm2, and the metal vapor is emitted at a speed of 1000m/s, of which every 10 electrons can emit 1 metal atom, and then these atoms are ionized into positive ions with high energy (such as Ti+), positive ions combine with other ions (such as with N- to form TiN) when operating in the vacuum chamber, and deposit on the surface of the workpiece to form a coating.
      According to the theory of vacuum arc discharge, the transfer of electric charge mainly relies on field electron emission and positive ion current. These two mechanisms exist at the same time and restrict each other. During the discharge process, a large amount of cathode material is evaporated, and the positive ions generated by these evaporated atoms generate an extremely strong electric field within a short distance near the cathode surface. The stage escapes into a vacuum, producing so-called "field electron emission".
      The multi-arc ion coating machine is generally relatively simple, and the entire equipment is mainly composed of several parts such as a vacuum coating chamber, an arc source, a vacuum acquisition system, and a bias source. The arc source is the key component of the multi-arc ion plating equipment. At present, small arc sources are generally used in China, with a diameter of 60-80mm and a thickness of 1/2 of the diameter. A few ion coaters are designed with a columnar arc source. A coating machine is only equipped with a columnar arc originating from the center of the vacuum chamber, and the workpiece is placed around. Some foreign ion coating machines use a large arc source with a diameter of 100mm and a thickness of about 1/4 of the diameter. One coating machine is equipped with 12 to 32 arc sources, and the workpiece to be plated is placed in the center of the vacuum chamber. Guangdong Huicheng Company is actively developing technical cooperation with domestic and foreign enterprises and research institutes. And gratifying results have been achieved in some commonly used coating application fields. The coating coating process can prepare alumina coatings with high hardness, thermal stability and chemical stability. The technology can prepare many physical vapor deposition coatings, such as TiN, TiCN, AlTiN, AlTiSiN, CrN and DLC, etc.