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Structure and principle of optical pvd coating machine

2022-04-22

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       Optical pvd coating machine can prepare a variety of films with optical generation, changing the transmittance and reflectivity characteristics of the substrate materials they are applied to, such as AR, UV/IR cut filters, AF, metal films for motors, hard AR film, enhanced reflective film, hard film, decorative film, ITO film, dichroic mirror, bandpass filter, polarizing resin, RGB filter, photocatalyst, HR film, etc., widely used in digital cameras, smart phones, Glasses, projectors, optical pickups, optical communications, LEDs, electronic products, decorative products, solar cells, displays, etc. The application fields are very wide and are closely related to the daily high-tech technology. The following will introduce the structure and principle of the optical pvd coating machine:


Optical pvd coating machine


       The optical pvd coating machine consists of a vacuum system, an evaporation system, a cooling system and an electrical system, wherein the vacuum system consists of a vacuum tank and an exhaust system. The vacuum tank is the main body of the coating machine, and the coating process is completed in the vacuum tank. The vacuum tank is connected to the exhaust system through a connecting valve. In order to prevent the influence of air molecules on sputtering ions and improve the quality of the film, the optical components and ion source must be placed in a vacuum environment during operation. The exhaust system is mainly composed of a mechanical pump, a Roots pump and a vacuum pump, which is responsible for discharging the gas in the vacuum tank and forming a vacuum environment in the tank. The evaporation system mainly refers to the part of the film forming device. There are many kinds of film forming devices in the coating machine, such as resistance heating, electron gun evaporation, magnetron sputtering, radio frequency sputtering, ion plating, etc.
       The principle of the optical pvd coating machine is to coat a thin film on the optical element by vacuum sputtering, so as to change the reflectivity and transmittance of the element to the incident light. At the same time, in order to reduce the reflection loss on the surface of the element as much as possible and improve the image quality, multi-layer films are often coated. After the optical element is coated, the light is reflected and transmitted multiple times on the surface of the multilayer film to form multi-beam interference. By controlling the thickness and refractive index of the film, different intensity distributions can be obtained. Using this principle, polarized reflective films, color beam splitting films, cold light films and interference filters can be manufactured to meet more complex needs