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How to maintain LOW-E glass coating machine

2023-01-15

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LOW-E glass coating machine is a professional equipment that uses vacuum magnetron sputtering to film on the surface of float glass. The vacuum degree of the coating cabin is 1.0E-6bar high vacuum. The production line uses vacuum magnetron sputtering to film on the surface of glass. Maintaining a high vacuum environment is the basic condition of LOW-E glass coating machine.


LOW-E glass coating machine


 LOW-E glass coating machine is composed of vacuum chamber, coating chamber, slit valve, process medium platform, slit valve, transmission system, hydraulic equipment, cooling system, vent system, compressed air system, cooling water system, etc., which is fully controlled by electrical program. The glass substrate is transported horizontally and straightly through the transmission roller table, and then enters the process chamber through the lock chamber, buffer chamber and transition chamber. After the coating process is completed, it passes through the crossover chamber, buffer chamber and lock chamber. The drive roller tables are linked by synchronous toothed belt, and the drive roller tables are connected with the roller tables by reducer through Schmidt coupling, rigid coupling, etc. The vacuum system is mainly realized by various vacuum pumps, and vacuum gauges at all levels are installed at each key position of the production line to measure the vacuum degree.
Production characteristics of LOW-E production line:
One of the characteristics of LOW-E glass coating machine is the periodicity of production, that is, "vacuumizing - production in vacuum state - breaking - chamber maintenance - vacuumizing". In the production state, the sputter deposited on the baffle and shield plate in the sputtering cabin will gradually thicken, which will gradually produce under-layer, crack and fall off. Falling on the glass will affect the coating of the glass and cause defects. Therefore, it is necessary to maintain the chamber when the glass defect caused by the falling sputter increases to a certain extent. In the continuous production state, the chamber maintenance will be carried out about 20 days. After the maintenance of the chamber is completed, the vacuum pumping is started. The vacuum pumping time is 36~48 hours. During this period, when the chamber vacuum reaches a certain level, the vacuum leak detection is carried out. After the vacuum leak detection has no problem and the chamber vacuum reaches the process conditions, the production preparation can be carried out. It takes 2 hours to break the air (from vacuum to atmosphere) before maintenance, and then the cabin maintenance can be carried out after all cathodes and pump cabins that need to be hoisted are blown with water.
According to the production characteristics of LOW-E, the inspection and repair of all equipment components in the chamber should be concentrated during the maintenance of the chamber, and the reliability of these devices should be guaranteed. Otherwise, if problems occur during normal production, it will take more than 40 hours just for the chamber to break and extract air, which has a huge impact on production. Therefore, the inspection and maintenance of LOW-E glass coating machine is a very important work.