The common maintenance methods of optical pvd machine are very important for coating engineers. When the optical pvd machine breaks down, it is also particularly important for the coating manufacturer to find out the cause and solve the problem in time. Next, we will introduce the common faults and maintenance methods of pvd machine in detail, hoping to help you.

1. When coating is in progress, the vacuum drops suddenly:
(1) The rubber ring of steam source water circuit is damaged (replace the rubber ring)
(2) The crucible is broken (replace the crucible)
(3) High voltage electrode seal is broken (replace rubber ring)
(4) The rubber ring at the rotating seal is damaged (replace the rubber ring)
(5) The sudden closing of the pre-valve may be caused by the damage of the two-position five-way valve (replace the two-position five-way valve)
(6) The sudden closing of the high valve may be caused by the damage of the two-position five-way valve (replace the two-position five-way valve)
(7) The mechanical pump may be shut down because the relay is disconnected (check whether the relay is normal)
(8) The electrode seal of the baking lead-in wire is broken (replace the rubber ring)
(9) The rubber ring at the dynamic seal of the baffle is damaged (replace the rubber ring)
(10) The glass observation mirror is cracked or cracked (replace the glass)