The vast majority of optical pvd coating machine use electron gun coating technology, which has high cost, large investment, and relatively large equipment size. Therefore, the cleaning and maintenance of optical pvd coating machine are of great concern. The editor of Huicheng Vacuum will introduce it in detail below. Here are the maintenance and cleaning methods of optical pvd coating machine, I hope it can help you:

 After using the optical pvd coating machine for one week (three shifts), the coating material is not only plated on the surface of the workpiece, but also has non-directional properties. , The winding is loose, absorbing a large amount of gas and causing the vacuum coating equipment to pump air more and more slowly. At this time, the working room and lining should be cleaned. If the disassembled parts are not necessary, they can be polished with sandpaper. The lining can be soaked in a hydrofluoric acid aqueous solution. The proportion of hydrofluoric acid and water depends on the length of soaking time and The principle is not to damage the liner. The lining must be dried before installation. Before drying, the lining should be wiped dry as much as possible. After cleaning the work frame and other parts with sandpaper, all dust in the vacuum chamber needs to be cleaned. This can be done with a vacuum cleaner. When the liner is finally installed, both the vacuum chamber and the liner need to be wiped clean with alcohol. Due to the use of electron guns and ion sources to assist coating, cleaning may be difficult. Sandblasting and other methods can be used to clean.
        The optical pvd coating machine needs to regularly replace the diffusion pump oil. The diffusion pump oil is used for a period of time, about two months (two shifts). Because in a long-term high temperature environment, although the diffusion pump is started at a higher vacuum, oxygen and other components still remain. It will react with the diffusion pump oil. The diffusion pump oil may also crack at high temperatures, causing its quality to deteriorate and prolonging the pumping time. It should be replaced when we think the time has extended too much. If the mechanical pump oil is used for two months, the quality of the oil will change. Because the oil may draw in moisture, impurities and other reasons, the viscosity of the used oil will become worse and the vacuum will decrease, so it needs to be replaced. If it is new equipment, it should be replaced within the first half month of use, because during the running-in period, the oil contains more running-in iron powder, which will aggravate wear.
         Optical pvd coating machine need to regularly clean the equipment and its surrounding environment, keep the inside and outside of the equipment clean, organize the environment around the equipment in order, and have a good working environment to ensure safety.