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Introduction to the coating principle of ion pvd coating machine

2023-09-06

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The coating technology of ion pvd coating machine is referred to as ion plating, which is a coating technology developed by American Sandin Company that combines vacuum evaporation and vacuum sputtering. The ion coating process is under vacuum conditions, using gas electricity to make the working gas or evaporated material Ionization is a process in which evaporates or other reactants are deposited on the surface of the substrate to be plated under the action of ion bombardment of working gas ions or evaporated substances.

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Under the bombardment of gas ions or evaporated material ions, the evaporated material or its reactants are evaporated on the workpiece. These include magnetron sputtering ion plating, reactive ion plating, hollow cathode discharge ion plating (hollow cathode evaporation method), multi-arc ion plating (cathode arc ion plating), etc. Ion plating combines glow discharge, plasma technology and vacuum evaporation technology, which not only significantly improves the various properties of the coating, but also greatly expands the application scope of the coating technology. In addition to the advantages of vacuum sputtering, ion plating also has the advantages of strong film adhesion, good diffraction, and a wide range of plating materials. Therefore, it has developed rapidly at home and abroad in recent years. The basic principle of ion plating is to ionize a metal or alloy vapor by means of a glow or arc discharge of an inert gas. Ion plating includes the heating, evaporation and deposition process of coating materials (such as TiN, TiC). When the evaporated coating material atoms pass through the glow zone, a small part of them are ionized and fly towards the workpiece under the action of the electric field. They are emitted onto the surface of the workpiece with an energy of several thousand electron volts and can penetrate into the substrate to a depth of about a few nanometers. , thus greatly improving the bonding force of the coating, and the evaporated material atoms without ionization are directly deposited on the workpiece to form a film. The sputtering of inert gas ions and coating material ions on the surface of the workpiece can also remove pollutants on the surface of the workpiece, thereby improving the bonding force.
Ion pvd coating machine coating technology is widely used. Ion technology can be used to coat metals, alloys, conductive materials, and even non-conductive material substrates. The film layer deposited by ion plating can be a metal film, a multi-element alloy film, or a compound film. It can be plated with one layer or multiple layers. It can also be plated with gradient coating and nano-multilayer coating. Different film materials and different reactions can be used. Gas and different process methods and parameters can obtain hard and wear-resistant coatings with surface strengthening, dense and chemically stable corrosion-resistant coatings, etc.