Electron beam evaporation coating machines are mostly used in the field of optical vacuum coating technology, such as our mobile phone screens, mobile phone cases, cameras, spectacle lenses, digital product screens, etc., all use electron beam evaporation coating machines. Optical coating technology has penetrated into our lives. , inseparable, so what is the structure of the electron beam evaporation coating machine? Let’s introduce the Huicheng vacuum coating machine in detail. I hope it can help you:
The electron beam evaporation coating machine is mainly composed of a control system, a vacuum air system and an electron gun system.
The vacuum air circuit in the electron beam evaporation coating machine has two pumps in the vacuum air circuit, which are the front-end mechanical pump and the high vacuum cryogenic pump. The function of the cryogenic pump is mainly at very low temperatures. According to The original purpose of the cold umbrella is to achieve the purpose of vacuuming. During the startup process of the high vacuum cryogenic pump, the front-end mechanical pump will first put the pipeline in a vacuum state. When the vacuum degree of the pipeline reaches a certain level, the Qianji valve will open, so that the front-end mechanical pump The pump will continue to work so that both the pipeline and the cryogenic pump are in a vacuum state, and then the backing valve will repeat the above steps.
The evaporation source of the electron beam is mainly composed of an electron gun and a crucible. When necessary, it may be accompanied by a set of mechanical equipment that can provide raw materials for the coating machine. In most cases, the control device that generates and controls the electron beam and the crucible design are integrated into the coating machine. The following are several structural forms of electron beam heating evaporation sources;
①Evaporator heated by linear cathode and electrostatic focusing.
②Evaporator heated by annular cathode and electrostatic focusing.
③Evaporator heated by axial gun and electrostatic far focusing method.
④Evaporator heated by axial gun, magnetic focusing and magnetic deflection 90 degrees.
⑤E-type electron gun evaporator, electron beam evaporation coating machine
The electron trajectory emitted by the e-type electron beam evaporation source is similar to the word "e", so it is referred to as the e-type gun.
At present, this form of evaporation source is the most widely used in the vacuum evaporation film process.