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Introduction to coating technology and advantages and disadvantages of high-frequency induction evaporation coating machine

2023-10-10

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High-frequency induction evaporation coating machine is also a type of evaporation coating machine. The crucible evaporation source used is different from that of resistance evaporation coating machine and electron beam evaporation coating. The high-frequency induction evaporation coating machine uses an induction coil to heat the film material, so it is named high-frequency induction evaporation coating machine. So what are the differences and advantages between it and other evaporation coating machines?


evaporation coating machine


 The evaporation source used in the high-frequency induction evaporation coating machine is to place the graphite or ceramic crucible containing the evaporation material in the center of the water-cooled high-frequency spiral coil, so that the evaporation material generates strong eddy current loss and induction under the induction of the magnetic field in the high-frequency band. Hysteresis loss (for ferromagnets) causes the evaporating material to heat up until it vaporizes. The smaller the volume of the membrane, the higher the frequency of induction. In large-scale equipment for continuous vacuum aluminum plating on steel strips, the high-frequency induction heating evaporation process has achieved satisfactory results.

Characteristics of high frequency induction evaporation source:
       1) The evaporation rate is large, about 10 times greater than the resistance evaporation source;
       2) The temperature of the evaporation source is uniform and stable, and splashing is not easy to occur;
       3) When the evaporation material is metal, the evaporation material can generate heat;
       4) The evaporation source is loaded once, no feeding mechanism is needed, the temperature control is relatively easy, and the operation is relatively simple.
 
The disadvantages of high frequency induction evaporation coating machine are:
       1) A boron nitride crucible with good thermal shock resistance and stable high-temperature chemical properties must be used;
       2) The evaporation device must be shielded and requires a more complex and expensive high-frequency generator;
       3) The pressure near the coil has a fixed value. If it exceeds this fixed value, the high-frequency field will ionize the residual gas and increase the power consumption.