After the pvd coating machine has been working for a long time, it needs maintenance. Only long-term continuous maintenance can it work more efficiently for a longer time. However, there are also skills in machine maintenance. Below, the editor of Huicheng Vacuum will introduce the maintenance skills of the pvd coating machine in detail. Hope it helps everyone:
1. Before restarting the diffusion pump, pay attention to leak detection.
If the diffusion pump has been used continuously for more than 6 months, the pumping speed has obviously slowed down, or the operation has been improper. It is filled with the atmosphere. Remove the connecting water pipe, remove the electric stove plate, unscrew the first-level nozzle, and first clean the pump chamber and pump bladder with gasoline. Once, wash it again with washing powder mixed with water, and then clean it with clean water*. After the water evaporates and dries, install the pump bladder, add new diffusion pump oil, and put it back into the body, connect the water pipes, and install the electric stove plate. You can then reboot.
The method is: start the maintenance pump, close the door, and after a few minutes, observe whether the vacuum degree of the diffusion pump part reaches 6X10 Pa, otherwise a leak detection is required. Check whether the sealing ring is installed at the joint or the sealing ring is damaged. Heating can only be done after eliminating the risk of air leakage, otherwise the diffusion pump oil will burn the ring and will not be able to enter working condition.
2. When the roughing pump (slide valve pump, rotary vane pump) works continuously for one month (halved in rainy season), new oil needs to be replaced.
The method is: unscrew the oil drain bolt, drain out the old oil, and then start the pump for a few seconds to drain out the old oil in the pump. Screw back the oil drain bolt and add new oil to the rated amount (observe with the oil sight glass). If it has been used continuously for more than half a year, the oil cap should be opened when changing the oil, and the dirt in the tank should be wiped clean with a cloth.
3. Every time the pvd coating machine completes more than 200 coating procedures, the studio should be cleaned once.
The method is: repeatedly scrub the wall of the vacuum chamber with a saturated solution of caustic soda (NaOH). (Note that human skin cannot directly contact the caustic soda solution to avoid burns.) The purpose is to make the plated film material aluminum (AL) react with NaOH. After the reaction, the film The layer falls off and hydrogen gas is released. Then clean the vacuum chamber with clean water and clean the dirt in the fine extraction valve with a cloth dipped in gasoline.