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Optical thickness monitor Accurate control of deposition rate and thickness Optical thickness monitor

The unique frequency measurement system provides stable, high-resolution rate and thickness measurement, and gives the monitoring process excellent repeatability. Through the deposition controller, QCM sensor can be used to control the deposition process. Huicheng vacuum can provide you with any deposition controller with the most basic and complete functions according to your requirements.

Even in the case of extremely low speed, it can ensure the highest and most stable speed and thickness measurement resolution. By automatically measuring the ratio of deposited materials, the accuracy of thickness measurement can be improved, and multiple sources can be co deposited at the same time. USB data storage function can store screen section, formula storage and data record.

Through the optical film thickness monitor, you can control the deposition speed and thickness extremely accurately, can reach almost any number of layers, easy installation and high reliability, thus ensuring production efficiency. Huicheng vacuum provides a very low cost instrument, which brings you unprecedented value. Whether your control needs to belong to the field of production or research and development, you can find the perfect solution from the optical film thickness monitor.

Product Advantage.

The optical film thickness monitor includes the following key capabilities:
  • Automation

    Automatic determination of deposited materials

  • Visual

    Color TFT LCD display makes it easy for users to see the progress of the process

  • Simple

    Easy to operate and maintain

  • Currency

    High performance, high throughput

  • Powerful storage

    USB data storage function can store screenshots, recipe storage and data records

  • Network

    Provide Ethernet connection

Mode IC6
Measuring performance
Frequency resolution ±0.0035 Hz @ 6 MHz
Thickness and rate resolution / measurement (1) ±0.00433 Å
Measurement frequency range 6.0 to 4.5 MHz (fixed)
Thickness accuracy (2) 0.50%
Measurement period 0.10 s
Average of multiple measurements 0.1, 0.4, 1.0, 4.0, 10.0, 20.0, and 30.0 sec. averaging allowed
Design function
Auto Z yes
Auto Tone yes
Codeposition yes (up to 6 sources)
Process recipe and data management
Material plan 32
Process layer (each process) 200
Process 50 (processes can be linked together)
USB storage yes
Data record yes
Hardware feature
Sensor (3)
Single 8
Double / CrystalTwo® 4 / 8 (with CrystalTwo® Switch)
CrystalSix® 8
Crystal 12® 8
Currency 8
Source control
Source quantity (4) up to 6
Source control voltage 0 to +/-10 V, adjustable
Output resolution 15 bits over full range (0 to 10V)
Crucible position 64
I / O
Input 14 standard, up to 28 optional; TTL/CMOS logic compatible or closure to ground
Output 8 standard, up to 24 optional programmable SPST relays rated at 30 V(dc) or 30 V(ac) RMS or 42 V peak @ 2.5 amps; 14 optional TTL outputs
Recorder output (4) 0 to +10 V, adjustable
Logical statement 100 fully programmable; up to 5 actions, 5 events per statement
Signal communication
Standard RS232
Optional Ethernet
Power requirements 100 – 230 V (ac) +/- 15%
50 / 60 Hz +/- 3 Hz
Working temperature 0 to 50°C (32 to 122°F)
Size 133mm x 483mm x 330 mm
Weight 23 lbs (10.5 kg)
(1) Tool / density = 100 / 1, base frequency = 6 MHz
(2) Varying with process; numerical representation of typical accuracy
(3) Maximum configuration of each type
(4) IC6 has 6 DAC output standards, and another 6 can be added. Either of the 12 can be configured as source control voltage or recorder output, but the number of sources that can be controlled simultaneously is 6

Application cases.

Mode XTC/3
Frequency resolution ±0.028 Hz @ 6 MHz
Measurement frequency range 6.0 to 5.0 MHz (fixed)
Measurement period 0.25 seconds
Thickness and rate resolution / measurement (1) ±0.034 Å
Measuring technique ModeLock
Number of processes 1
Number of layers 1
Planned quantity of materials (or films) 9
Number of sensor inputs 2
CrystalSix / Crystal 12 Sensor support Yes
Support XTAL 2 switch Yes
Source output quantity 2
Electronic communication RS232 standard, Ethernet TCP/IP optional
Maximum RS232 baud rate 115.2 KBaud
Automatic crystal conversion Yes
Number of relays 12, Not Event Assignable
Number of programmable relay functions 1
Function of each relay 1
Rated voltage of relay 30VDC or 30VAC RMS or 42V peak at 2.5 Amps
Enter quantity 8 TTL, 24VDC Max
Number of programmable input functions 1, Not Event Assignable
Number of recorder outputs 1
Manual power supply / handheld controller Yes
Exhaust fan No Exhaust Fan
Test mode Yes
Gate delay Yes
Overmold Yes
Shell size half rack, 2U high
Rate and thickness display resolution 0.1 A/s for 0.0 to 99.9 A/s, 1 A/s for 100 to 999 A/s, display thickness resolution = 1 A
Select film by input Yes
User guide language English, Chinese
Control loop PID
Software for operation from PC Yes
Data record Yes
Quality and stability function Yes
Sample hold (RateWatcher™) Yes
Crucible selection Yes
Crucible feedback input Yes
Select control voltage polarity Yes, +/- 2.5, 5, 10 Volts; 15-bit Resolution
Program lock code Yes
Display with graphics Yes
User tagging process (mobile alphanumeric input) No
User mark film (mobile alphanumeric input) No
Transmission sensor control Yes
XTC/2 RS232 Communication compatibility Yes (limited)
(1) Tool / density = 100 / 1, base frequency = 6 MHz

Application cases.

Mode SQC-310
QCM input 2 (4 optional)
Measurement frequency range Adjustable:
1.0 MHz minimum
6.5 MHz maximum
Frequency resolution (1) ± 0.012 Hz
Thickness and rate resolution / measurement (2) ±0.015 Å
Frequency stability ± 2 ppm total, 0 to 50C
Measurement period 0.10 to 1.0 s (adjustable)
Rate display 0.01 Å/sec
Storage 100 processes, 1000 layers, 50 films
Control output 2 (4 optional)
Output signal ± 0 to 10 VDC, 15 bits
Digital input / relay 8/8 (16/16 optional)
Digital input 5 VDC non-isolated
Relay SPST Form 1A, 30V, 2A max
Interface Standard RS-232 and USB (RS-232 and Ethernet optional)
Remote power control Optional (IPN 782-900-017)
Type 1/4 VGA 320 x 240 active matrix color LCD
Chart Rate, deviation, power or full screen numeric
Power 100-240 VAC, 50/60 Hz, 25W
Compliance CE, RoHS
Windows® Software Included
Housing / installation 5 1/4” half-rack
(1) Resolution of 0.25 second measurement interval
(2) Tool / density = 100 / 1, base frequency = 6 Hz, 0.25 second measurement interval

Application cases.

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